Heterogeneous metallocene catalysts were prepared by adsorbing rac-Et(Ind)(2)ZrCl2 on a modified silica surface in solution. The modification of silica was conducted in gas phase with atomic layer chemical vapor deposition (ALCVD) technique, where the silica, preheated at either 350 or 600 degrees C, was allowed to react with vaporized trimethylaluminum (TMA) at 250 degrees C, Modified carriers and heterogeneous catalysts were characterized with FTIR, H-1 MAS (magic-angle spinning) NMR, C-13, and Si-29 CP (cross-polarization) MAS NMR spectroscopies and elemental analyses. In the reaction of TMA with silica, a saturated surface was formed consisting of different (-O)(4-n)Si(CH3)(n) (n = 1, 2 or 3) and -AlCH3 groups. The ratio of -SiMe to -AlMe groups was approximately 1.5 in the TMA/SiO2 carriers. When the metallocene was adsorbed onto the carrier it seemed to react with the surface -AlCH3 groups and possibly -ZrCH3 groups were formed. Heterogeneous catalysts were tested in the polymerization of ethylene and propylene in the presence of methylalumoxane (MAO). And they produced similar polymer as the homogeneous rac-Et(Ind)(2)ZrCl2 catalyst, but with lower activity. A catalyst with the best activity was achieved from silica that was preheated at 600 degrees C. Moreover, leaching of catalyst was examined whereupon a part of zirconium was observed to desorb from the carrier.