Germanium oxide glass thin films were prepared by the sol-gel method and annealed under reduced atmosphere to create more oxygen-deficient defects. The densification and crystallization were examined depending on sintering and annealing conditions. Thus, homogeneous germanium oxide thin films with a high content of oxygen vacancies were fabricated. Ultraviolet absorption and oxygen vacancies of the films were investigated as a function of annealing temperature and time. Optical absorption in the 5-eV region due to the formation of oxygen vacancies is enhanced with increasing annealing temperature and time. The formation energy of oxygen vacancies is calculated to be about 1.0 eV.