화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.85, No.3, 636-640, 2002
Effects of coffee-bean-like morphology and graded interlayer on texture evolution of plasma-enhanced chemical-vapor-deposited Ti-C-N films
Titanium nitride (TiN), titanium carbide (TiC), and titanium carbonitride (TiCxN1-x) were prepared by plasma-enhanced chemical vapor deposition. A graded interlayer was introduced to explore its effects on the texture of the TiC and TiN. The results showed that the topography of the TiCxN1-x, which resembled coffee beans, resulted from a twinning core structure that caused the dendritic grain shape and enhanced the <211> texture of (TiC0.62N0.38)-N-. and TiC0.75.N-0.25. As graded coating was used as a transition layer. the texture of TiC was changed from (220) to (200), and TiN was changed from (200) to (220) due to the pseudomorphic forces provided by the first layer plus graded layer. The residual stress contributions to this phenomenon are also discussed.