Integrated lead zirconate titanate thin films deposited on Pt/Ti/SiO2/Si substrates using a novel triol-based route were characterized using X-ray diffraction and transmission electron microscopy. Crack-free single-layer PZT films of up to 200 mn thick were prepared by triol-based sol-gel processing onto Pt/Ti/SiO2/Si substrates. Films similar to75 nm thick exhibited a microstructure free of pores and second phase. As film thickness increased, film texture changed from {100} to {111} perovskite. Essentially, single-phase multilayer films could be prepared by the deposition and pyrolysis of several 75 nm layers, followed by a single crystallization step. The influence of heat-treatment schedule on the microstructure and orientation of the multilayer films is discussed. Comparison has been made between multilayer films prepared using the triol-based sol and an inverted mixing order/acetic acid-based sol.