화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.87, No.8, 1578-1581, 2004
Preparation of a monodispersed suspension of barium titanate nanoparticles and electrophoretic deposition of thin films
A transparent and stable monodispersed suspension of nano-crystalline barium titanate was prepared by dispersing a piece of BaTiO3 gel into a mixed solvent of 2-methoxyethanol and acethylacetone. The results of high-resolution transmission electron microscopy (HR-TEM) and size analyzer confirmed that the BaTiO3 nanoparticles in the suspension had an average size of similar to10 nm with a narrow size distribution. Crystal structure characterization via TEM and X-ray diffraction indicated BaTiO3 nanocrystallites to be a perovskite cubic phase. BaTiO3 thin films of controlled thickness from 100 nm to several micrometers were electrophoretic deposited compactly on Pt/Ti/SiO2/Si substrates. The deposited thin film had uniform nanostructure with a very smooth surface.