The Raman spectra of Ca3SiO5 have been successfully obtained at temperatures up to 1353 K by a continuous-wave ultraviolet Raman spectroscopic system. The Raman spectra do not change significantly with an increase in temperature, despite triclinic (T) -> monoclinic (M) -> rhombohedral (R) transitions. The present result is described in terms of the parameter related to temperature variation at constant pressure, defined in a manner similar to the Gruneisen parameter. Raman bands located above 350 cm(-1) show smaller values of the parameter than lower frequency modes, suggesting that these higher frequency modes are assigned to SiO4 internal modes.