화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.88, No.10, 2736-2739, 2005
Production of nanocrystalline titanium nitride powder by atmospheric microwave plasma torch in hydrogen/nitrogen gas
Nanocrystalline titanium nitride (TiN) particles were directly synthesized in an atmospheric microwave plasma torch, using gas-phase titanium tetrachloride (TiCl4), with N-2 and H-2 as reactants. The gas-phase TiCl4 was injected with H-2 gas into the microwave plasma-torch flame generated by N-2 swirl gas, and then the dark blue powders were deposited on the inner wall of the quartz tube. The synthesized powder samples were analyzed by scanning electron microscopy (SEM), SEM-EDX, X-ray diffractometer (XRD), transmission electron microscopy, and FT-Raman. The average crystallite sizes of TiN measured from XRD patterns decreased from 15.5 to 11.6 nm, as the flow rate of H-2 injected into the microwave plasma torch increased from 0.03 to 0.3 liters per minute.