화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.89, No.3, 1136-1139, 2006
Chemical solution deposition of (Ba1-xSrx)TiO3 thin films and characterization
A simple system has been developed for the preparation of stable precursor solutions for dip coating (Ba1-xSrx)TiO3 thin films. From such stable solutions highly crystalline, uniform and crack-free thin films are obtained by dip coating, followed by annealing at temperatures as low as 600 degrees C. The pyrolysis behavior, crystallization mechanism, and thin film morphology have been studied using thermogravimetric and differential thermal analysis, X-ray diffraction, and scanning electron microscopy. The dielectric tunability characteristics have been determined for thin films of composition (Ba1-xSrx)TiO3, x = 0.30, to study their suitability for tunable device applications.