We have demonstrated a synthetic procedure for nano-sized NaNbO3 powder and its thin films using a carbon-free precursor prepared by the reaction of H2O2 with sodium and niobium alkoxides. A combination of X-ray powder diffraction, Raman spectra, and thermal gravity and differential thermal analysis, carbon analysis, fourier transform infrared spectra, transmission electron microscopy, and atomic force microscopy was used to characterize the resulting materials and precursor compounds. Results show that this procedure demonstrates the major advantages of low-temperature synthesis (similar to 400 degrees C) and low weight loss during transformation into NaNbO3 because of its carbon-free nature, which also provides the option of preparing nano-sized particles and dense, crack-free NaNbO3 thin films.