Ordered arrays of high aspect ratio (> 10:1) ferroelectric Pb(Zr0.52Ti0.48)O-3 (PZT) tube structures were fabricated by vacuum infiltration of macroporous silicon (Si) templates. Improved phase purity was achieved when PZT microtubes were pyrolyzed at 300 degrees C and partially released from the Si template to prevent a chemical reaction between the Pb and the Si during subsequent high-temperature crystallization. The free-standing microtubes were crystallized by rapid thermal annealing at 750 degrees C for 1-3 min. Perovskite phase formation was confirmed by X-ray diffraction and transmission electron microscopy methods. Coaxial structures comprised of metallic LaNiO3, PZT, and Pd layers were also processed to enable future electrical characterization of the ferroelectric microtubes.