For the first time, thin films of perovskite-type La0.8Sr0.2MnO3 (LSM) were deposited on yttria-stabilized zirconia (YSZ) substrates by microwave plasma coating technique, using an aerosol precursor generated by ultrasonic excitation. Precursor was a mixed aqueous solution containing the corresponding nitrates and glycine which could promote the thermal decomposition of nitrates. The deposited film had a single-phase perovskite microstructure with a thickness of 4-5 mum. The metal element ratio of the as-deposited film was close to that of the solution. Studies showed that glycine played a vital role for obtaining the single perovskite phase La0.8Sr0.2MnO3 2001 Elsevier Science B.V. All rights reserved.