화학공학소재연구정보센터
Journal of Crystal Growth, Vol.209, No.4, 621-624, 2000
Impurity reduction and crystalline quality improvement due to isovalent doping (In) in GaAs epilayers on Si substrate by chemical beam epitaxy
The effects of In-doping (0.04-0.59%) at low temperature on crystalline qualities are demonstrated in the heteroepitaxy of GaAs on Si grown by chemical beam epitaxy (CBE). From 4.2K photoluminescence it is clear that for an indium content of 0.04 and 0.29%, the intensity of the acceptor bound excitonic recombination at 1.492 eV has increased 2-fold and 4.5-fold, respectively. For the sample doped with 0.29% indium, the peak originates from native defects (possibly V-Ga) or complexes involving native defects has a reduction of peak intensity by about 70% when compared to undoped GaAs/Si. The crystal quality of GaAs on Si substrate with different In-content has been evaluated by etch-pit density.