Journal of Crystal Growth, Vol.210, No.1-3, 143-150, 2000
TEM assessment of GaN epitaxial growth
A generalised description of the predominant defect microstructures within homo- and hetero-epitaxial GaN grown by chemical vapour deposition and molecular beam epitaxy is presented. The nature of dislocations, basal and prismatic plane stacking faults, domain boundaries, micropipes, voids and inversion domains are briefly described, with particular regard being given to their mechanisms of formation.