High-resolution near-field cathodoluminescence (NF-CL) investigations were performed using a scanning near-field optical microscope/scanning electron microscope hybrid system. It has been demonstrated that structures that are not detectable with standard CL are now observable under near-field conditions. In this presentation, we would like to compare SEM-CL and the new NF-CL with respect to future failure analyses. The advantages and disadvantages of both techniques will be illustrated and discussed.