화학공학소재연구정보센터
Journal of Crystal Growth, Vol.212, No.3-4, 597-600, 2000
Role of lateral growth fronts in the formation of InxGa1-xAs bridge layer on trench substrates
The role of the lateral growth fronts in the formation of InGaAs bridge layer on trench substrates was investigated. For the edge angles of growth fronts less than or equal to 90 degrees, the bridge layers were formed on the basis of "Berg effect". The bridge formation of {1 1 1}A growth front was greatly influenced by its neighboring {1 1 1}B growth front.