Homoepitaxial YBa2Cu3Ox (YBCO) films were grown on single-crystal (0 0 1)YBCO substrates by a metalorganic chemical vapor deposition (MOCVD) method using metal beta -diketonate complexes as metalorganic sources. The single-crystal substrate was fabricated from bulk single crystals. Its surface was polished mechanically, treated by dipping in a HCl/methanol solution and modified by depositing one monolayer of CuOx, High-quality (0 0 1)-oriented YBCO homoepitaxial growth was carried out using the substrate surface and the reproducible MOCVD technique which has been developed for realizing the process.