화학공학소재연구정보센터
Journal of Crystal Growth, Vol.225, No.2-4, 221-224, 2001
Dependence of temperature gradient on growth rate in CZ silicon
The dependence of temperature gradient in CZ-SI crystal on the growth rate is examined by analyzing the experimental result where growth rate alone was varied without changing any other conditions. Unreported data are reproduced using the heat balance equation at the interface. It is shown that the temperature gradient increases linearly with the growth rate. The mechanism is discussed in terms of the heat flow and the interface shape.