화학공학소재연구정보센터
Journal of Crystal Growth, Vol.235, No.1-4, 277-282, 2002
Growth of perovskite-type oxides (RE, Sr)(Al, Ta)O-3 as substrates for GaN epitaxial growth (RE = La, Nd)
ew compositions for perovskite-type oxides (RE, Sr)(Al, Ta)O-3 (RE = La, Nd) were investigated from solid-state reactions and grown by Czochralski method as substrates for GaN epitaxial growth. These compounds crystallize in a cubic system. The lattice mismatch with GaN is in the range of 1.24-1.70%. The linear expansion coefficients are around 10 x 10(-6) K-1. Hydride vapor phase epitaxy growth of GaN was performed on (La, Sr)(Al, Ta)O-3 substrates. Free-standing GaN wafers similar to300 mum thick were obtained. (C) 2002 Elsevier Science B.V. All rights reserved.