We consider the possibility of PZT thin-film preparation using a diffusion process of PbTiO3 (PT) and PbZrO3 (PZ) multilayer films prepared by a chemical solution deposition (CSD) method, Both PT and PZ Solutions were spin-coated onto a Pt/Ti/SiO2/Si substrate layer-by-layer; the PT and PZ two-layer films was pyrolyzed. Subseqently, this Sequence was repeated to form multilayers: PT/PZ ... PT/PZ. These multilayer thin films were heat-treated to promote PT and PZ layer interdiffusion. In the case of thin film prepared from 0.025 M precursor Solutions, a PZT single phase was obtained and ferroelectric properties were successfully characterized. Remnant polarization (P-r) and the relative dielectric constant (epsilon(r)) were P-r = 26 muC/cm(2) and epsilon(r) = 900, These values are equivalent to those of PZT thin films fabricated by the usual CSD method. (C) 2002 Elsevier Science B.V. All rights reserved.