We propose a hybrid model to simulate the cluster deposition process. This model consists of the direct simulation Monte Carlo and Monte Carlo methods that combine the macro with the nano scale. We investigate the effects of certain experimental parameters in cluster-formation process on the film morphology, including packing density. The model reveals that the morphology is strongly affected by the size distribution of the incident clusters. These results indicate the possibility of designing unique thin-film structures and properties. (C) 2002 Published by Elsevier Science B.V.