Growth mechanism of PbTiO3 and PbZrxTi1-xO3 (PZT) films grown by metalorganic chemical vapor deposition oil Pt(111)/SiO2Si(100), SrTiO3(100) and SrRuO3(100)/SrTiO3(100) substrates was investigated using scanning electron microscopy, scanning probe microscopy and transmission electron microscopy. The Volmer-Weber growth mode was observed for PbTiO3 and/or PZT on both Pt/SiO2/Si and SrTiO3 with the SrO-terminated plane. PZT on both SrTiO3 with TiO2-terminated plane and SrRuO3/SrTiO3 showed the Stranski-Krastanov growth mode. From piezoresponse measurements using SPM, it was found thet nano-size PbTiO3 and PZT islands on Pt/SiO2/Si observed at the initial growth stage showed ferroelectricity. Using PbTiO3 islands as a seed, low temperature growth at 395degreesC of PZT thin films was demonstrated. (C) 2002 Elsevier Science B.V. All rights reserved.