In order to fabricate intrinsic Josephson junctions (IJJs) on a submicron-scale, crystal growth of Bi2Sr2CaCu2Ox (BiSrCaCuO) at step edge structures has been investigated. In this paper, we report on a crystal growth of BiSiCaCuO at step edges structures fabricated on SrTiO3 substrates. Line patterns with a line width of 0.3 mum are prepared at a lower part of the step edge structures along [110] and [100] azimuth of Si-TiO3. The BiSrCaCuO crystals have successfully been grown on the step edge structures. The step edge structures consist of a stack of plate-shaped crystals surrounded by (0 0 1) (1 1 0) (0 1 0) and (1 0 0) facets. A 0.7-mum-wide bridge structure of BiSrCaCuO fabricated by the same technique shows a superconductivity and has a critical current density of 4.8 x 10(6) A/cm(2) at 37 K. These results indicate that this technique is promising for device fabrications in submicron- or nano-scale. (C) 2002 Elsevier Science B.V. All rights reserved.