화학공학소재연구정보센터
Journal of Crystal Growth, Vol.237, 1757-1761, 2002
Numerical study of 3D unsteady melt convection during indu strial-scale CZ Si-crystal growth
We present a computational model of 3D turbulent melt convection in Czochralski Si-crystal growth systems, based on the hybridization of Reynolds-averaged approach and large eddy simulation. The effect of superimposed magnetic field action on the melt flow is introduced in the model to account for the suppression of turbulent melt fluctuations. The model has been verified using experimental data for temperature in the melt and along the melt-crucible surface. Effects of axial magnetic field on the change in melt convection Lire studied in an industrial configuration. (C) 2002 Elsevier Science B.V. All rights reserved.