The purification method for refining of tellurium to 6N + using quadruple zone refining is described. Trace impurities at ppb/ppt level are analyzed using inductively coupled plasma mass spectrometry (ICPMS). These results are compared with similar trace impurities content in tellurium matrix purified by analogous methods and characterized by various proven analytical techniques. Periodic dependence on the atomic number of relative impurities concentration in the input (5N Te) to the out put tellurium (6N +) is discussed. The selenium in tellurium matrix is found to be 0.4 ppb after zone refining. (C) 2003 Elsevier Science B.V. All rights reserved.