The properties of self-assembled InAs quantum dots (QDs) grown by molecular beam epitaxy on GaAs substrates were investigated. The surface properties of samples were monitored by reflection high-energy electron diffraction to determine growth. Photoluminescence (PL) and transmission electron microscope (TEM) were then used to observe optical properties and the shapes of the InAs-QDs. Attempts were made to grow InAs-QDs using a variety of growth techniques, including insertion of the InGaAs strained-reducing layer (SRL) and the interruption of In flux during QD growth. The emission wavelength of InAs-QDs embedded in a pure GaAs matrix without interruption of In flux was about 1.21 mum and the aspect ratio was about 0.21. By the insertion InGaAs SRL and interruption of In flux, the emission wavelength of InAs-QDs was red shifted to 1.37 mum and the aspect ratio was 0.37. From the PL and TEM analysis, the properties of QDs were improved, particularly when interruption techniques were used. (C) 2003 Elsevier B.V. All rights reserved.