In this paper we describe the preparation of high quality epitaxial films of the Sr4Fe6O13+delta compound with intergrowth structure by pulsed laser deposition on single crystal SrTiO3(0 0 1) substrates. The dependence of composition, structure and microstructure on the deposition conditions has been studied. The films prepared at the optimum conditions consist of b-axis oriented Sr4Fe6O13 +/- (delta). Texture analysis reveals in-plane alignment with the a- and c-axis oriented along the SrTiO3 < 1 1 0 > directions. The film-substrate interfaces are well-defined and abrupt at an atomic scale. The films are partially strained due to the epitaxial growth on the SrTiO3 substrate. The cell parameters of the films are very stable to high temperature annealing either under reducing or oxidizing conditions. (C) 2003 Elsevier B.V. All rights reserved.