MW-CBD is a low-temperature deposition technique that gives transparent and well-adhered TiO2 thin films. TiO films on transparent conducting oxide are important for dye-sensitized solar cells, extremely thin absorber solar cells and for electrochromic devices. We study how the growth process of TiO2 films using MW-CBD is influenced by substrate type using SnO2:F and ITO substrates. Crystallinity of the films is mainly determined by the precursor solution rather than by the substrates studied, though morphology of the substrate influences the morphology of the films. Using the SnO2:F substrate more texturized TiO2 films grow. All films showed photovoltaic behavior. Current near short-circuit current in the I-V characteristic are within experimental uncertainty for films obtained on different substrate type but with the same precursor solution. Films obtained on SnO2:F with the precursor solution based on fluorine-complexed titanium(IV) exhibit the best results. In this case, open-circuit photovoltage increases appreciably. (C) 2003 Elsevier B.V. All rights reserved.