화학공학소재연구정보센터
Journal of Crystal Growth, Vol.266, No.1-3, 54-59, 2004
Numerical study of transient behaviour of molten zone during industrial FZ process for large silicon crystal growth
The fully transient axisymmetric model has been developed for calculation of phase boundaries in large (up to 200 mm diameter) industrial floating zone (FZ) silicon single crystal growth with the needle-eye technique. The transient model is implemented in a specialized computer program. The model and program are based on a previously developed model and program for steady-state FZ process calculations. This transient approach allows studying of such substantially time-dependent process phases as the growth of the starting and ending cones of the crystal rod, which are particularly important for growth of large crystals in practice. Numerous calculations are carried out and the results for reducing crystal diameter during growth process are presented. (C) 2004 Elsevier B.V. All rights reserved.