화학공학소재연구정보센터
Journal of Crystal Growth, Vol.272, No.1-4, 37-41, 2004
Trimethylindium transport studies: the effect of different bubbler designs
The transport of trimethylindium (TMI) must be highly reliable throughout the lifetime of a bubbler. This study reports stability data and transport rates obtained for a number of alternative bubbler designs when tested under different conditions of use. The best results, with exceptionally stable flux output across a wide range of operating parameters throughout the bubbler lifetime, were obtained using a novel perforated disc design. This design is an extension of the cross dipleg concept which provides Multiple gas pathways to minimise channelling effects and allow uniform and efficient depletion of the bubbler contents. (C) 2004 Elsevier B.V. All rights reserved.