p-Type zinc oxide (ZnO) thin films with. C-axis orientations were realized using the DC reactive magnetron sputtering by Al and N co-doping method. Second ion mass spectroscopy (SIMS) tests proved that both Al and N were doped in the ZnO films and the incorporation of Al facilitated the N solution into ZnO, thus promoted the formation of p-type conduction. When oxygen partial pressure ratios was 40% or 85%, the as-grown ZnO thin films showed p-type conduction, and the latter had better electrical properties. The obtained p-type ZnO films showed a resistivity of 157 Omega cm, a hole concentration of 5.59 x 10(17) cm(-3), and a Hall mobility of 0.0711 cm(2)/V s at room temperature. X-ray diffraction (XRD) patterns showed that the ZnO film prepared in 60% of oxygen partial pressure ratio had the best G axis orientation. The as-grown ZnO films possessed transmittance of about 90% in the visible region. (C) 2004 Elsevier B.V. All rights reserved.