Cadmium telluride (CdTe) thin films were prepared by the closed space Sublimation (CSS) technique, using CdTe powder as evaporant onto substrates of water-white glass. In the next step, the same procedure was adopted by using tellurium as evaporant and already deposited CdTe film as substrate. Such compositions were then annealed at 300 degrees C for 30 min to obtain Te-enriched films. The samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), spectrophotometry, DC electrical resistivity, dark conductivity and activation energy analysis as a function of temperature by two-probe method. The electron microprobe analyzer (EMPA) results showed ail increase of Te content composition in the samples as the mass of the Te-deposition increased in CdTe. The Hall measurements indicated the increase in mobility and carrier concentrations of CdTe films by addition Of tellurium. A significant change in the shape and size of the CdTe grains were observed. (c) 2005 Elsevier B.V. All rights reserved.