A high density of aligned ZnO nanoneedles was selectively grown on carbon-coat patterned Si substrates. The ZnO nanoneedles were synthesized by metalorganic chemical vapor deposition using diethylzinc and oxygen gas. The growth temperature was 480 degrees C. The grown ZnO nanoneedles had single crystalline atomic Structure and pure compositions with no any impurities. The nanoneedles showed a strong near-bandedge PL emission at 3.29 eV with no significant deep-level emission peaks. (c) 2005 Elsevier B.V. All rights reserved.