Vapor transport of ZnO by PVT and CVT using carbon, carbon monoxide and hydrogen as the transport agents was studied. Theoretical calculations of the mass flux were based on equilibrium thermodynamics and ID diffusional mass transport. Experimental results were found to be consistent with theoretical predictions. No apparent kinetic limitations to sublimation or CVT processes were observed. Slow reaction of carbon with ZnO source was found. (c) 2005 Elsevier B.V. All rights reserved.