Applied Surface Science, Vol.159, 472-480, 2000
Si(Ge)/oxide-based heterostructures and their applications to optoelectronics
Epitaxial Si(Ge)oxide semiconductor/wide-gap material systems have been developed as a new class of Si-based heterostructure. Optoelectronic device capabilities are highlighted, and also reported are preliminary results of the fabrication of Si/SiO2 cavity resonance photodiodes and SiGe-based wavelength-selective "near-surface" photodetectors in a metal-semiconductor-metal configuration.
Keywords:Si(Ge)/oxide;Si-based heterostructure;optoelectronics;resonance photodiode;"near-surface" photodetector