Applied Surface Science, Vol.159, 508-513, 2000
Direct evaluation of atomic layer intermixing via disordering in ALE grown (GaAs)(m)(GaP)(1) system
Atomic layer intermixing at pseudomorphic interfaces has been evaluated directly by changing of electronic states due to disordering in (GaAs)(m)(GaP)(1) (m = 2, 3, 4) superlattice grown by atomic layer epitaxy (ALE). The results show the critical change of the electronic structures due to atomic layer intermixing at GaAs/GaP hetero interface. The interdiffusion coefficients are about two orders of magnitude higher than values of the self-diffusion. It is suggested that microscopic and inhomogeneous strain effects are closely related to the exchange of neighboring atoms at the interface.