화학공학소재연구정보센터
Applied Surface Science, Vol.168, No.1-4, 227-233, 2000
Pulsed laser deposition and characterization of perovskite thin films on various substrates
Pulsed laser deposition (PLD) is a unique tool to grow high quality thin films of complex composition. In recent years it was demonstrated by several groups that PLD is capable of depositing material ol er application relevant substrate sizes with good uniformity. In this contribution YBCO thin films and buffer layers were deposited by a special PLD setup on substrates as large as 7 cm x 20 cm. For this purpose the UV laser light is focussed to an 8 cm Line on cylindrical targets while the substrate is scanned perpendicular to the line focus. Different kinds of substrates (SrTiO3, MgO, LaAlO3 and Sapphire) were coated with YBCO. Two important points of the presented PLD-setup will be discussed in detail: the way of substrate heating and the variation of the angle between the incident laser beam and the target surface ('wobbling'). The structural and electrical properties of the deposited YBCO thin films were investigated by X-ray diffraction (XRD) and inductive measurements of the critical current density j(c). Furthermore, PLD was used to deposit ferroelectric (Pb,La)(Zr,Ti)O-3 (PLZT) thin films on high-grade steel Hastelloy. This polycrystalline alloy is suitable as substrate and electrode material as well. The deposited films were characterized with respect to their structural, topological and ferroelectric properties.