We presents the new fabrication process of metallic superlattices such as Fe/C multilayers at length scales ranging from a few to hundreds of nanometers using pulsed-typed plasma with high electron density generated from the new coaxial vacuum are. Transmission electron microscopy (TEM) techniques have been used to characterize the structure of these multilayers. Amorphous C and crystalline alpha -Fe multilayers with flat interfaces were fabricated by changing the number of pulse discharge and cathode targets.