The effect of electron irradiation of adsorbed layers of ammonia on the Ge (100) surface has been studied using high resolution electron energy loss spectroscopy (HREELS). We have confirmed a previous observation that ammonia adsorbs molecularly on the Ge (100) surface. Electron irradiation results in dissociation of ammonia and desorption of hydrogen directly into the vacuum without deposition of hydrogen onto the surface. Formation of germanium nitride at 110K was observed as a result of electron irradiation of adsorbed ammonia as evidenced by presence of a Ge-N stretch mode near 800 cm(-1).