화학공학소재연구정보센터
Applied Surface Science, Vol.172, No.3-4, 220-224, 2001
Atmospheric pressure chemical vapour deposition of selenium films by KrF laser photolysis of dimethyl selenium
KrF laser-induced photolysis of gaseous dimethyl selenium in excess of helium is controlled by cleavage of both Se-C bonds and affords ethane as a very dominant gaseous product together with elemental selenium, The photolysis mechanism being different from that of thermolysis shows potential for chemical vapour deposition of selenium films not contaminated with carbon impurities.