The mass density of thin organosilicon films deposited by chemical vapour deposition on silicon (0 0 1) surfaces has been determined by X-ray reflectometry. This method does not give a unique mass density value, but instead a bandwidth of possible values and compositions that an compatible with the experimental data if the layer thickness is not larger than about 350 nm. For thicker films thickness values obtained from ellipsometry data are used. The possible composition ranges are compared with data obtained by X-ray photo electron spectroscopy.