Applied Surface Science, Vol.173, No.1-2, 134-139, 2001
The estimation of the average dimensions of deposited clusters from XPS emission intensity ratios
We propose a method for the calculation of the average size of spherical clusters on a surface, using XPS emission intensity ratios. The method is applied to the case of Cu clusters on Dow Cyclotene 3022. a low permittivity polymer. It gives reasonable particle sizes and number densities, and shows that the clusters coalesce on annealing. TEM photomicrographs confirm the size and sphericity of the clusters formed.
Keywords:cluster formation;metallization