화학공학소재연구정보센터
Applied Surface Science, Vol.177, No.1-2, 15-21, 2001
Monte-Carlo simulation of laser ablated plasma for thin film deposition
Monte-Carlo (MC) simulation is employed to study the laser induced carbon plasma used for deposition of thin carbon films. The bifurcation of the laser ablated plume expanding in an ambient atmosphere in to fast and slow components is discussed. The dependence of the film profile on to a substrate on pressure of ambient gas and distance between the target and the substrate is presented.