Diamond-like carbon (DLC) thin films have been grown on Si(I 1 1) substrates by laser ablating a graphite target in a UHV system. Two kinds of depositions have been processed depending on the experimental conditions, a highly oriented pyrolytic graphite (HOPG) film and a DLC film. A relationship of the film microstructure with laser power density and substrate conditions was observed. The films are in situ monitored and characterized during the first stages of the deposition process by means of surface spectroscopic techniques, such as AES, XPS and EELS. The film microstructure is confirmed by SEM. Clear evidence of a SiC interface, two monolayers thick, was observed to form due to chemical reaction of the first carbon species with the substrate surface. The formation of this interface is believed to improve film adherence. (C) 2002 Elsevier Science B.V. All rights reserved.