Applied Surface Science, Vol.203, 343-347, 2003
A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications
A floating low energy gun (FLEG) has been developed for charge neutralization in the SIMS analysis of insulating specimens. The FLEG has been characterized, and its effectiveness at low beam energies on fragile insulating samples has been compared with the performance of conventional electron guns. (C) 2002 Elsevier Science B.V. All rights reserved.