Solar cells consisting of polymer layers sandwiched between a transparent electrode on glass and a metal top electrode are studied using dynamic time-of-flight secondary ion mass spectrometry (TOF-SIMS) in dual-beam mode. Because depth profiling of polymers and polymer-metal stacks is a relatively new field the craters were thoroughly investigated by environmental SEM (ESEM), interferometry, surface profilometry and tapping mode AFM. A huge increase in crater bottom roughness was observed when starting from the aluminum top layer going in depth, resulting in a loss of depth resolution. It is shown that layer-to-layer diffusion and contaminants at buried interfaces can be extracted from the depth profiles when taking into account the loss of depth resolution. (C) 2002 Elsevier Science B.V. All rights reserved.