Semiconducting stoichiometric copper(I) selenide (Cu2Se) thin films were deposited onto glass substrate using a modified chemical method. The deposition conditions such as concentration and pH of cation and anionic precursor solutions, immersion and rinsing times and number of immersions, etc. were optimized for Cu2Se films. The characterization of Cu(2)se films was carried out by using X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDAX), Rutherford back scattering (RBS), optical absorption/transmittance, electrical resistivity and thermoemf measurement techniques. The XRD shows the formation of copper(I) selenide with monoclinic crystal structure. Absorbance of the Cu2Se thin film is found to be high (10(4) cm(-1)) with optical band gap of 2.35 eV. The electrical resistivity is of the order of 10(-1) Omega cm. Film exhibits p-type electrical conductivity. (C) 2003 Published by Elsevier Science B.V.