Transparent conducting antimony-doped tin oxide (SnO2:Sb) films have been prepared on polyimide and Coming 7059 substrates by radio frequency magnetron-sputtering technique at low substrate temperature (30-220 degreesC). Polycrystalline SnO2:Sb films having the rutile structure were deposited with resistivity as low as 3.7 x 10(-3) Omega cm on polyimide substrate and 2 x 10(-3) Omega cm on glass substrate. The average transmittance exceeded 70.6 and 85.5% in the visible spectrum for 285 and 315 nm thick films deposited on polyimide, and glass substrate, respectively. A comparison of the properties for the films deposited on glass and organic substrates was performed. (C) 2003 Elsevier Science B.V. All rights reserved.