The lead titanate (PbTiO3 : PTO) films grown by PE-CVD had (0 0 1) and (1 1 1) orientations on the substrates of Pt(1 0 0)/ MgO(1 0 0) and Pt(1 1 1)/MgO(1 1 1) while the PTO film had (1 0 0) orientation on the Pt(1 1 1)/MgO(1 0 0) substrate. The PTO thin film with (0 0 1) orientation had the best flatness. The PTO film on the Pt(1 0 0)/MgO(1 0 0) substrate having the crystallographic orientation corresponding to the polarization direction showed a ferroelectrical hystersis loop. (C) 2003 Elsevier Science B.V. All rights reserved.