Applied Surface Science, Vol.218, No.1-4, 137-142, 2003
Study of range distribution parameters for fluorine ions implantation in AgGaS2 crystal
Range distributions for fluorine ions implanted in AgGaS2 in an energy range of 80-350 keV were measured by using the F-19(p, alphagamma) O-16 resonant nuclear reaction at E-R = 872.1 keV, with width Gamma = 4.2 keV. A proper convolution calculation method was used to extract the true distributions of fluorine from the experimental excitation yield curves. The range distribution parameters, R-p and DeltaR(p), were obtained and compared with those obtained from different Monte Carlo simulation computer codes. (C) 2003 Elsevier Science B.V. All rights reserved.