TiO2 magnetron sputtered thin films were used for preparation of metal-oxide-metal (MOM), aluminum-TiO2-aluminum. We have analyzed the electrical polarization and frequency dependent effect for the electric capacitance and dielectric loss for TiO2-based structures. We have found that there is a strong dependence of TiO2 dielectric constant with the electric field intensity and signal frequency. We have found that the dielectric properties have weak dependencies of thickness for amorphous TiO2 thin films. (C) 2003 Elsevier B.V. All rights reserved.